Conference Introduction

In recent years, the combination of emerging functional materials and devices such as wide bandgap semiconductors and ultra-wide bandgap semiconductors with advanced processes like heterogeneous integration and 3D packaging has been driving semiconductor technology toward diversified innovation and accelerated iteration. These technologies are fostering a new generation of high-performance, low-power, and multifunctionally integrated semiconductor solutions.

The 13th Forum on Semiconductor Devices and Fabrication Technology will be sponsored by the Bureau of Personnel, CAS, and organized by the Nano-Fabrication Facility at Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), CAS, and co-organized by Shanghai Regional Center of Materials and Manufacturing Instruments and Suzhou Nano Technology Development Co., Ltd. The Forum will be held at the Suzhou International Expo Centre from October 22nd to 24th, 2025.

The Forum invites renowned experts specializing in new semiconductor materials, devices, and heterogeneous integration technologies from universities, research institutes, and enterprises to share their professional knowledge, thoroughly analyze the technical challenges of new semiconductor materials and devices, and explore the latest trends in advanced heterogeneous integration technologies. The forum will feature both theoretical training and technical discussions, delivered in an accessible and in-depth manner.

This Forum is intended as a public training event, aiming to provide an opportunity for technical personnel in related industries to learn and communicate. Attendance is free but limited in number. We warmly welcome college students, R&D engineers, and scientific researchers to register and participate.

Organization

Host

    • Bureau of Personnel, CAS

Organizer

    • Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), CAS

Co-organizers

    • Shanghai Regional Center of Materials and Manufacturing Instruments
    • Nanopolis Suzhou Co., Ltd.

Main topics

2025 Agenda Overview

2025 Agenda Overview

Date: Oct. 22
Location: A108, Suzhou International Expo Center
Moderator: Zhongming Zeng, Professor of Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), Chinese Academy of Sciences, Director of the Nano-Fabrication Facility
Distinguished Speaker:Baoshun Zhang, Professor of Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), Chinese Academy of Sciences
Date: Oct. 23
Location: A108, Suzhou International Expo Center
Moderator:Xiaodong Zhang, Professor of Suzhou institute of Nano-Tech and Nano-Bionics (SINANO), chinese Academy of Sciences
Moderator: Wenhua Shi, Professor of Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), Chinese Academy of Sciences, Vice Director of the Nano-Fabrication Facility
Wenkui Lin, Professor of Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), Chinese Academy of Sciences
Date: Oct. 24
Location: Nano-Fabrication Facility
The 13th Forum on Semiconductor Devices and Fabrication Technology——New Semiconductor Functional Materials and Devices and Their Heterogeneous Integration Technologies
Speaker
Zhiping Zhou
Dr. Zhiping Zhou holds a Ph.D. from Georgia Institute of Technology and is currently a professor at Peking University and the founder of Aijie Optoelectronics. He is a Fellow of OSA, SPIE, and IET; an Honorary Director of the Chinese Optical Society, and an Executive Director of the Chinese Society for Optical Engineering. He is also the founding Editor-in-Chief of Photonics Research. He was the chief editor of China’s first book on Silicon Based Optoelectronics. From 1987 to 2005, he studied and worked in the United States. In 2005, he returned to China full-time to focus on silicon based optoelectronics research. He previously served as a professor at Huazhong University of Science and Technology and as Assistant Director of the Wuhan National Laboratory for Optoelectronics (under development at the time). In 2014, he led and completed a major project under the Ministry of Science and Technology’s 12th Five-Year Plan (863 Program), successfully developing 100Gb/s silicon-based optical modulation transmitter and coherent receiver chips - filling a critical gap in China’s silicon based optoelectronic chip technology.
The 13th Forum on Semiconductor Devices and Fabrication Technology——New Semiconductor Functional Materials and Devices and Their Heterogeneous Integration Technologies
Speaker
Zhihong Feng
Zhihong Feng is the Chief Scientist of China Electronics Technology Group Corporation (CETC), a research fellow at CETC’s 13th Research Institute, and a doctoral supervisor at the China Academy of Electronics and Information Technology. He received his Ph.D. in Electrical and Electronic Engineering from the Hong Kong University of Science and Technology. He currently serves as the Executive Deputy Director of the National Key Laboratory of Solid-State Microwave Devices and Circuits and as a Distinguished Adjunct Professor at Shandong University. He is a national-level leading talent and a recipient of the State Council Special Government Allowance. His research interests cover wide-bandgap semiconductors, carbon electronics, and terahertz electronic technologies. He led the development of the world’s first international standard on gallium nitride (GaN), has published over 200 SCI-indexed papers, and holds more than 100 authorized invention patents. He has also edited and published three academic monographs in both Chinese and English. Dr. Feng has received one National Science and Technology Progress Award (First Class) and five provincial and ministerial-level science and technology awards (First Class). He has been listed among the world’s top 2% most influential scientists and has earned numerous honors, including the National Innovation and Excellence Award and the National Outstanding Engineer Award.
The 13th Forum on Semiconductor Devices and Fabrication Technology——New Semiconductor Functional Materials and Devices and Their Heterogeneous Integration Technologies
Speaker
Huikai Xie
Professor of School of Beijing Institute of Technology (BIT), Director of BIT Chongqing Center for Microelectronics and Microsystems
Huikai Xie, Ph.D., Professor, School of Integrated Circuits and Electronics, Beijing Institute of Technology (BIT); Director of BIT Chongqing Center for Microelectronics and Microsystems;IEEE Fellow, SPIE Fellow. He received his BS, MS and Ph.D. degrees from BIT, Tufts University and Carnegie Mellon University, respectively. He joined the University of Florida as an assistant professor in 2002, and was promoted to the rank of Associate Professor with tenure in 2007 and Full Professor in 2011. He returned to his alma mater - BIT in 2020. He has published over 350 technical papers, holds 20+ granted US patents and 60+ granted Chinese invention patents. His current research interests include MEMS/NEMS, CMOS MEMS, inertial sensors, acoustic MEMS, optical MEMS, LiDAR, NIR spectroscopy, and optical microendoscopy. He is an associate editor of IEEE Sensors Letters, Sensors and Actuators: A, and Chinese Journal of Sensors and Actuators.
The 13th Forum on Semiconductor Devices and Fabrication Technology——New Semiconductor Functional Materials and Devices and Their Heterogeneous Integration Technologies
Speaker
Kai Cui
Deputy Director of the Micro-Assembly Technology Innovation Center
Dr. Kai Cui received his Ph.D. from the Institute of Semiconductors, Chinese Academy of Sciences. He is currently the Deputy Director of the Micro-Assembly Technology Innovation Center. His research focuses on cutting-edge microsystem integration technologies, as well as the engineering applications of new materials and advanced processes. He has conducted in-depth research in areas such as thick/thin-film hybrid circuit and SIP manufacturing, micro/nano fabrication of high-density silicon/glass-based packaging substrates, wafer-level advanced packaging, and 3D heterogeneous integration of microsystems. In the past five years, he has published over 20 academic papers, filed more than 10 patents, released 5 industry standards, and received 5 provincial or ministerial-level science and technology awards.
The 13th Forum on Semiconductor Devices and Fabrication Technology——New Semiconductor Functional Materials and Devices and Their Heterogeneous Integration Technologies
Speaker
Xiaowei Guan
Professor of Jiaxing Research Institute, Zhejiang Univeresity
Dr. Guan Xiaowei, Senior Researcher at Jiaxing Research Institute, Zhejiang Univeresity earned his Ph.D. from Zhejiang University in 2014. Formerly a Researcher/Assistant Professor at the Technical University of Denmark, he returned to China in 2021 to lead the establishment of a micro-nano fabrication platform for photonic chips. His work focuses on integrated photonics (waveguide mode control, nonlinear materials), micro-nano fabrication, and applications, with 30+ journal papers (1500+ citations) and honors including the First Prize in China Optical Science and Technology Award.
The 13th Forum on Semiconductor Devices and Fabrication Technology——New Semiconductor Functional Materials and Devices and Their Heterogeneous Integration Technologies
Speaker
Tingting Qiu
East Application Manager of ZEISS
Qiu Tingting holds the position of East China Application Manager. She obtained her master's degree from Nanjing University of Aeronautics and Astronautics in 2017 and joined the Microscopy Division of Carl Zeiss (Shanghai) Management Co., Ltd. in 2019. With over 8 years of professional experience in the electron microscopy field, she currently oversees work related to microscope technical communication, application development, and technical training. She is proficient in applications across diverse fields such as materials science and semiconductor micro-nano processing. She has provided microscopy analysis solutions, technical demonstrations, and equipment technical support to more than 100 domestic universities, research institutions, and enterprises.
The 13th Forum on Semiconductor Devices and Fabrication Technology——New Semiconductor Functional Materials and Devices and Their Heterogeneous Integration Technologies
Speaker
Weihang Zhang
Professor of Xidian University
Weihang Zhang, Professor at Xidian University, Deputy Director of Guangzhou Wide Bandgap Semiconductor Innovation Center, mainly engaged in research on wide bandgap semiconductor devices and integrated circuits. In recent years, he has published over 50 SCI papers in journals such as IEEE EDL, TED, APL, etc., and has been granted more than 20 invention patents in China and the United States, and co-authored one monograph. He managed over more than ten projects, including national key research and development programs, national science and technology major projects. His research achievements won the first prize of the 2021 Chinese Institute of Electronics Technology Invention Award.
The 13th Forum on Semiconductor Devices and Fabrication Technology——New Semiconductor Functional Materials and Devices and Their Heterogeneous Integration Technologies
Speaker
Jiandong Ye
Professor of Nanjing University
Dr Jiandong Ye holds the full professorship at Nanjing University. His research focuses on ultra-wide bandgap semiconductor materials and devices. Over the past five years, he has published more than 100 high-impact papers, and holds 14 authorized invention patents. He has led major research programs including the National Key R&D Program of China, the NSFC Distinguished/Key/Excellent Young Scientist Projects, and key projects funded by Jiangsu Province. He has received the Second Prize of the Jiangsu Provincial Science and Technology Award and the Australian Research Council QE II Fellowship Award.
The 13th Forum on Semiconductor Devices and Fabrication Technology——New Semiconductor Functional Materials and Devices and Their Heterogeneous Integration Technologies
Speaker
Jian Wang
Professor of Huazhong University of Science and Technology, Deputy Director of Wuhan National Laboratory for Optoelectronics
Jian Wang is the professor and doctoral supervisor at Huazhong University of Science and Technology (HUST), and deputy director of Wuhan National Laboratory for Optoelectronics (WNLO). He is a recipient of the National Natural Science Fundation of China for Distinguished Young Scientist and the Expert with Special Government Allowance from the State Council of China. He is also a Fellow of the Chinese Optical Society (COS), as well as a Fellow of IEEE, OPTICA (formerly OSA), SPIE, and IOP (Institute of Physics). He used to receive many honors, including National Natural Science Fundation of China for Outstanding Young Scientist, Young Changjiang Scholars of China, National Youth Top-notch Talent of China, and Royal Society-Newton Advanced Fellowship. His research focuses on multi-dimensional optical communications, optical signal processing, optical computing, optoelectronic devices and integration, photonic integrated circuits, and light field manipulation. As the first awardee, he has twice received the First Prize in Natural Science Award of Ministry of Education of China and once the First Prize in Natural Science Award of Chinese Optical Society. He has also been honored with IEEE Photonics Society Distinguished Lecturer, Youth Science Award of Ministry of Education of China, Wang Daheng Optics Award, and Rao Yutai Physics Award. He has led three National Key R&D Program projects (as Principal Investigator) and one project of National 973 Program. As the first/corresponding author, he has published high-impact papers in prestigious journals such as Science, Science Advances, Nature Photonics, Nature Communications, Light: Science & Applications, and Physical Review Letters. His research achievements have been highlighted by Nature and recognized as a Significant Progress by the OPTICA society (formerly OSA). They were also showcased at China’s 13th Five-Year Plan Scientific and Technological Innovation Achievements Exhibition. He plays many leadership roles, including Executive Council Member of Chinese Optical Society, OPTICA Fellow Members Committee, and Vice Chair of IEEE Photonics Society Wuhan Chapter. He also serves as the Editor-in-Chief of IEEE Photonics Journal, Executive Editor-in-Chief of Frontiers of Optoelectronics, and Deputy Editor of Chinese Optics Letters.
The 13th Forum on Semiconductor Devices and Fabrication Technology——New Semiconductor Functional Materials and Devices and Their Heterogeneous Integration Technologies
Speaker
Zhe Cheng
Assistant Professor of Peking University
Zhe Cheng is an assistant Professor at the School of Integrated Circuits, Peking University, as well as a Weiming Young Scholar and Boya Young Scholar. His primary research interests include thermal management of electronic devices, thermal metrology and equipment, heterogeneous integration, and electro-thermal co-design of electronics. Dr. Cheng received his Ph.D. from the Georgia Institute of Technology in the United States and subsequently conducted postdoctoral research at the University of Illinois at Urbana-Champaign. He has published more than 50 papers in prestigious journals such as Nature Communications, Applied Physics Reviews, and Small. He has also published 3 book chapters. His publications have more than 3,000 citations. His honors include the “National Award for Outstanding Self-financed Students Abroad” by the China Scholarship Council.
The 13th Forum on Semiconductor Devices and Fabrication Technology——New Semiconductor Functional Materials and Devices and Their Heterogeneous Integration Technologies
Speaker
Qing Wan
Director of Research Center at Yongjiang Laboratory
Dr. Qing Wan received his bachelor’s degree in Materials Science from Zhejiang University in 1998 and his Ph.D. in Microelectronics from the Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, in 2004. He has conducted research and teaching at Hunan University, the Ningbo Institute of Materials Technology and Engineering (CAS), and Nanjing University. He is currently Director of the Research Center for Heterogeneous Integration of Functional Materials and Devices at Yongjiang Laboratory. With over 20 years of experience in semiconductor and functional materials and devices, his representative achievements include: 1. As early as 2001, he published the world’s first paper on exploring the Smart-cut process for LiTaO3 single-crystal thin films, laying the material foundation for their applications in 5G/6G RF filters and electro-optic modulators. 2. In 2009, he successfully developed the world’s first amorphous IGZO dual-gate TFTs, published China’s first paper on IGZO thin-film transistors, and is also the inventor of the IGZO-based neuromorphic transistor. 3. He invented a room-temperature temporary bonding technology, which, combined with backside precision thinning, enabled fast and ultra-low-cost thinning of large-size (8-12 inch) silicon wafers and large-size (6-8 inch) lithium niobate/tantalate single crystals. He has published over 300 SCI papers in leading journals such as Nature Communications, Advanced Materials, Applied Physics Letters, and IEEE Electron Device Letters, with more than 30,000 citations, and has been recognized for many consecutive years as one of China’s Highly Cited Researchers. He received the National Top 100 Doctoral Dissertations Award in 2006, the China Youth Science and Technology Award in 2009, the First Prize of Zhejiang Science and Technology Award (ranked first) in 2013, the National Science Fund for Distinguished Young Scholars in 2014, and was selected for the National Leading Talent Program (‘Ten Thousand Talents Program’) in 2018.
The 13th Forum on Semiconductor Devices and Fabrication Technology——New Semiconductor Functional Materials and Devices and Their Heterogeneous Integration Technologies
Speaker
Xin Ou
Professor of Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences
Xin Ou is a Professor at the National Key Laboratory of Integrated Circuit Materials, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences. He is a recipient of the National Science and Technology Innovation Leading Talent Award Building on silicon-based SOI material technology and addressing the critical demand for heterogeneous integration materials in 5G acoustic, optical, and electronic core chips, he has developed the “Universal Ion Knife” heterogeneous integration XOI materials and devices technology. He has successfully developed multiple heterogeneous wafer fabrication techniques, which have been applied to RF, optoelectronic, and power chips.
The 13th Forum on Semiconductor Devices and Fabrication Technology——New Semiconductor Functional Materials and Devices and Their Heterogeneous Integration Technologies
Speaker
Shenglin Ma
Professor of Xiamen University
Dr. Ma Shenglin, Professor and Doctoral Supervisor at the Department of Mechanical and Electrical Engineering, Xiamen University. He was selected as one of the Top 10 Young Innovative Talents in Xiamen in 2023. In recent years, he has led key projects including National Natural Science Foundation Major Research Plan Cultivation Project, and Xiamen Science and Technology Major Project. He has also undertaken multiple industry-university-research projects from key enterprises such as Huawei HiSilicon and ZTE Microelectronics. He has published over 70 academic papers as the first author/corresponding author, authored three academic monographs, and obtained over 40 authorized patents. As the first completer, he won a first prize for provincial and ministerial-level scientific and technological progress award.
The 13th Forum on Semiconductor Devices and Fabrication Technology——New Semiconductor Functional Materials and Devices and Their Heterogeneous Integration Technologies
Speaker
Lei Zhang
Coater & Temporary Bonder Technical Product Manager of SUSS MicroTec (Shanghai) Co., Ltd.
Mr. Zhang Lei joined SUSS in 2015 and currently serves as the Product Manager for Coating and Temporary Bonding. He has been dedicated to promoting and applying advanced semiconductor packaging, MEMS, and 2.5D/3D heterogeneous integration related processes and equipment for a long time. He has rich experience in product management and process development, and are committed to promoting the implementation and development of temporary bonding technology in the semiconductor manufacturing field.
The 13th Forum on Semiconductor Devices and Fabrication Technology——New Semiconductor Functional Materials and Devices and Their Heterogeneous Integration Technologies
Speaker
Wenhua Shi
Professor of Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), Chinese Academy of Sciences
Wenhua Shi is a Senior Engineer (Professor-level) and Doctoral Supervisor, currently serving as Deputy Director of the Nano Fabrication Facility at the Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences (CAS). He received his bachelor’s degree in Physics from the University of Science and Technology of China in 2002, and his Ph.D. in Physics from the Institute of Semiconductors, CAS, in 2007. He has been selected for the CAS Youth Innovation Promotion Association and recognized as a Key Technical Talent of CAS. His research focuses on micro/nano-fabrication processes and related device development, covering areas such as microsystem integration technologies, Micro-LED displays, nanophotonic waveguide devices, and novel optoelectronic materials and devices.
The 13th Forum on Semiconductor Devices and Fabrication Technology——New Semiconductor Functional Materials and Devices and Their Heterogeneous Integration Technologies
Speaker
Chunhong Zeng
Associate Professor of Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), Chinese Academy of Sciences
The 13th Forum on Semiconductor Devices and Fabrication Technology——New Semiconductor Functional Materials and Devices and Their Heterogeneous Integration Technologies
Speaker
Chunhong Zeng/Wenkui Lin
Associate Professor of Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), Chinese Academy of Sciences / Associate Professor of Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), Chinese Academy of Sciences
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