Biography:Wang Chenying, professor, doctoral supervisor, Xi ’an Jiaotong University. She is currently the deputy director of the Institute of Intelligent Sensing and System, School of Instrument Science and Technology, Xi ’an Jiaotong University.

She has presided over a number of national key research and development projects, National Natural Science Foundation, Youth Fund and other national projects. To develop 4 kinds of national first-class standard substances and 10 kinds of national second-class standard substances; Won the first prize of Science and Technology Progress of China Mechanical Engineering Society in 2021; First Prize of Science and Technology Progress Award of China Society of Metrology and Testing in 2020; Second Prize of Science and Technology Progress Award of China Society of Metrology and Testing in 2016; She has published more than 50 articles and more than 10 patents.

Research field:

Research on the application of flexible devices and intelligent wearable sensing technology

Research on key technologies of micro - and nano-geometric quantities of national standard materials

Research on international traceability and comparison of micro - and nano-geometric national standard materials

Educational experience:

September 1995 -- July 1999 Bachelor of Mechanical Engineering and Automation, Xi ’an Jiaotong University

Sep. 2002 -- Apr. 2005 Master of Mechanical Engineering, Xi ’an Jiaotong University

Sep. 2009 -- Dec. 2014 Doctor of Instrument Science and Technology, Xi ’an Jiaotong University

Major Technology Awards:

In 2021, the first prize of Science and Technology Progress of China Machinery Industry Science and Technology Award, ranking 1/15;

In 2020, the first prize of Science and Technology Progress Award of China Society of Metrology and Testing, ranking 6/10;

In 2016, the second prize of Science and Technology Progress Award of China Society of Metrology and Testing, ranking 3/10;

In 2021, the first prize of Shaanxi Science and Technology Workers Innovation and Entrepreneurship Competition, ranking 1/10.

Principal position

Sep. 2017 - Present National Interchangeability and Measurement Technology Basic Research Association Executive Director and Deputy Secretary-General

May 2018 -- Now Director of Micro and Nano Actuators and Microsystems Branch of China Society of Micron and Nanotechnology

Jan. 2019 - Deputy Secretary-General of Shaanxi Mechanical Engineering Society

October, 2023 - Now Deputy Director of the Institute of Intelligent Sensing and System, School of Instrument Science and Technology, Xi ’an Jiaotong University

Abstract:

Micro and nano geometric metrology technology is widely used in typical industries such as chip, industrial mother-machine, advanced manufacturing and biomedicine. It is of great significance to study the carrier of micro and nano geometric quantity - micro and nano geometric quantity standard material for the realization of chip size controllable preparation and the improvement of chip performance. Therefore, facing the major needs of national metrology institutions and the above-mentioned industries for high-precision micro and nano geometric quantity reference materials, the research group developed a series of cross-scale micro and nano geometric quantity reference materials and realized the integration of calibration structures and online detection, improving the length measurement value transmission system in China, and providing metrology guarantee for improving the overall quality level of related micro and nano devices in China.

Biography:Wu Jinjie, Ph.D., Researcher, is the Director of the dimensional Metrology Division of the National Institute of Metrology, China, He was formerly the Chairman of the Technical Committee on Ionizing Radiation (TCRI) of the Asia Pacific Metrology Program (APMP). His main research area focus on X-ray metrology, and he has been responsible for completing more than ten projects. He has established four primary standards in X-rays, piloted or participated in six international comparisons, and published over 80 academic papers. He has received the APMP-Iizuka Young Scientist Award, and seven Science and Technology Progress Award awards.

Abstract:The report mainly introduces the evolution and development of the definition of the length SI unit meter from a physical object to a fundamental physical constant, the traceability requirements for measurement raised by atomic-scale manufacturing such as integrated circuits, the realization principle and technology of the atomic-scale meter definition based on the X-ray interferometer, and finally introduces the new metrological system based on the silicon lattice constant and its application in nanometer and sub-nanometer measurement.

Biography:Guanglu Ge, professor at National Center for Nanoscience and Technology (NCNST), obtained his Ph.D. under the supervision of Prof. Louis Brus from Columbia University in 2001, and postdoctoral training at UCLA and Caltech. He joined NCNST in 2005 and since then has focused the research efforts on standardized testing methods and reference materials for nanomaterial characterization. He has been Principle Investigator of National R&D program from MOST since 2016, published over 80 papers in journals such as Advanced Materials, and received IEC 1906 award in 2018.

Prof. Ge is actively involved in nanotechnology standardization. He is now the convenor of ISO/TC229/WG4 (Nanomaterial specification), and the deputy director of Technical Committee on Nanotechnology of Standardization Administration of China (SAC/TC279). Prof. Ge’s team has led or co-led the drafting of 10 ISO/IEC international standards and 19 national standards. Specifically, by collaborating with domestic industry, his team developed series of physicochemical testing standards for quantum dots, carbon nanotubes and graphene.

Abstract:Among the elements of quality infrastructures of nanotechnology, standardization plays central role of supporting metrology, testing and inspection, and promotes validation and application of research results.     

Like other high-tech fields, nanotechnology standardization faces challenges such as determining needs and market maturity for standardize, obtaining consensus among vastly different stakeholders, and lack of inter-lab comparison data. Since 2005, ISO/TC229 and IEC/TC113 have laid ground in terminology, characterization, EHS and material specification. China has been very active in nanotechnology standardization, leading more than 40 international standards and published more than 140 national standards. These efforts attracted participation from and facilitated quality of nanotechnology innovation industry.

This talk will introduce the current status and provide perspective in this field.  

Biography:Doctor, researcher, Director of Nanometrology Laboratory at the Center for Advanced Metrology Science, NIM, visiting scholar at NPL in the UK and PTB in Germany. Engaged in long-term research on nanometrology technology, leading the establishment of the national nanogeometry value transfer system and conducting applied research in the nanometrology service industry. Current member of ISO/TC201 and TC213, the member of National Technical Committee on Geometric Length Measurement and the leader of Nano Working Group, the member of SAC/TC240, the member of Geometric Measurement Committee of Chinese Measurement and Testing Society. In recent years, he has presided over or participated in more than 10 national and provincial science and technology projects, such as the National Key Research and Development Programme, the Ministry of Science and Technology’s Major Instrument Development Project and other national and provincial science and technology projects. He has been awarded 10 scientific research awards at provincial and ministerial levels.

Biography:Zhao Fengxia, Professor, School of Mechanical and Power Engineering, Zhengzhou University. Executive Director of "National Institute of University Interchangeability and Measurement Technology", member of "National Product Geometry Technical Specification Standardization Technical Committee (SAC/TC240)", director of micro and nano Manufacturing and Equipment Branch of China Society of Micron and Nanotechnology. Her main research fields are GPS based digital metrology technology and application, machine vision technology and application, MEMS and micro and nano testing technology. She presided over and participated in the formulation (revision) of 22 national standards in the field of GPS.

Abstract:In international standards, the GPS standard system is one of the most widely influential and important basic standard systems, closely related to important standard systems such as quality management (ISO9000) and product model data exchange (STEP). It is the foundation of manufacturing informationization, quality management, industrial automation systems and integration, and its important role is increasingly recognized by the international community. Its development and application level not only affect a country’s economic development, but also have a decisive effect on a country’s scientific and technological and manufacturing level. GPS provides mathematical tools for the digital design and detection of geometric quantities in products. Research the application of these mathematical tools in the evaluation and expression of geometric features of micro and nano structures, and explore the analysis, evaluation, and standardization of geometric features of micro and nano structures.

Biography:Han Xiangguang: Assistant professor of Xi ’an Jiaotong University, graduated from Xi’ an Jiaotong University in 2021, and then stayed in the university. He studied under Professor Zhao Libo, a leading scholar.

He has published 15 academic papers and applied for more than 20 national invention patents. Among them, 3 SCI papers have been published as the first author or the first author, and 3 academic papers have been published in the top journals Microsystems and Nanoengineering (IF = 7.12) and Sensor and Actuator A (IF = 3.4).

As the leader of the project, I participated in a number of national pressure sensor development projects, including national Key RESEARCH and development Program, China Youth Foundation, etc., and presided over a number of special pressure sensor development projects in the military industry, such as Aerospace Science and Technology Group, Aviation Industry Group and North Industries Group.

Research direction: deep pressure sensor technology research field, hosted the development of high precision resonance pressure sensor, high sensitivity micro pressure sensor, high precision temperature pressure integrated sensor special pressure sensor, made a number of research results, and as a backbone member to participate in a number of national pressure sensor development projects. In the MEMS pressure sensor research has accumulated a solid foundation and rich knowledge accumulation.

Major academic achievements:

High-performance microdifferential pressure MEMS pressure sensor is developed;

MEMS temperature and pressure integrated sensor high precision temperature compensation and miniaturization packaging;

The stress matching packaging method of the high temperature pressure sensor greatly improves the high temperature resistance and measurement accuracy;

Realize the integrated thin film sensor high precision, high reliability vector force measurement.

study experience:

2017.09~2021.06 Doctor of Instrument Science and Technology, Xi’an Jiaotong University;

2011.09~2013.06, Master of Mechanical Engineering, Xi’an Jiaotong University;

2007.09~2011.06, China University of Petroleum (East China);

Abstract:Pressure is one of the basic parameters of fluid internal measurement, which is crucial for fluid control and equipment condition monitoring. Therefore, MEMS pressure sensors have wide applications in automotive, medical and aerospace fields. Through accurate pressure measurement, the condition of the equipment can be accurately monitored and the potential faults are predicted. MEMS pressure sensors include higher sensitivity, higher accuracy, multi-parameter integration, smaller chip size, smaller package size, and better robustness in harsh environments. This course explains high performance MEMS pressure sensor in various applications, including differential pressure sensor (MDPS), resonant pressure sensor (RPS), integrated pressure sensor, miniature pressure sensor and no wire packaging pressure sensor, detailed their working principle, research progress, technical difficulties and development prospects.

Curriculum outline:

1. Background knowledge of high-performance MEMS pressure sensor;

2. Micro-differential pressure pressure sensor;

3. Resonant pressure sensor;

4. Integrated pressure sensor;

5. Miniature pressure sensor;

6. No lead packaging pressure sensor;

7. Summary and outlook of the high-performance MEMS pressure sensor.

Biography:Sen Han received his PhD in optical engineering from the University of Stuttgart, Germany. He is a professor of University of Shanghai for Science and Technology, one of co-founders of Suzhou H&L Instruments LLC, a Fellow of the International Society for Optical Engineering (SPIE), an adjunct professor of the Wyant College of Optical Sciences at the University of Arizona, USA. He has received R&D 100 awards twice. He has undertaken more than 20 scientific research and engineering projects, developed more than 40 optical instruments, published 16 academic proceedings, 130 papers, and 40 patents.

Abstract:Super-smooth surfaces are widely evaluated by using laser interferometers due to its outstanding sub-nanometer accuracy and precision. In this talk, we will summarize their advantages and then describe their applications in optical metrology and industrial inspection. 

Transmission flat has normally l/20 PV. However, when a flat surface under test is better or much better than the transmission flat, we need the absolute flat measurement. We developed a new method to be easily able to achieve the accuracy of l/100 PV. We have dedicated our efforts to do so. The theoretical analysis, computer simulations, and experimental validation are presented in the paper.

Biography:Ma Zhichao, Tang Aoqing Distinguished Professor of Jilin University, Deputy Dean of the School of Mechanical and Aerospace Engineering. Engaged in research on micro/nano mechanical testing technology and instruments of materials. He hosted national key research and development program project, key project of major research program of NSFC, and won an excellent completion project in the mechanical discipline of NSFC. He published 117 SCI papers in journals such as Nat Commun. Developed 2 industry standards and authorized 52 invention patents in China and the United States. Selected as a young scholar in the National Talent Project, awarded the First Prize for Technological Invention by the Ministry of Education, Jilin Province, and in the Machinery Industry, also won the Young Science and Technology Talent Award by the China Instrument and Meter Society, and the Youth Science and Technology Award by Jilin Province. He was selected as a member of MIT Technology Review Innovators Under 35 in China and won the first prize at the first China Science and Technology Youth Forum.

Abstract:The damage and failure of materials often lead to major accidents, and the problem key lies in the unclear micro mechanical behavior, deformation and damage mechanisms, and performance evolution laws of materials. The lack of relevant testing instruments restricts the performance improvement of advanced materials. This talk will introduce the research status of micro/nano indentation testing technology and instruments of materials, illustrate the development, application, and evaluation of self-developed instruments, and explore the standardization issues of instruments. On this basis, the in-situ testing instruments under development will be introduced, which is expected to break through the limitations of traditional experiments that can only obtain material mechanics parameters but cannot monitor structural evolution laws, and facilitate to reveal the correlation among material "structure-behavior-performance".

Biography:Liu Hongzhong, Professor, Xi’an Jiaotong University, Deputy Director of the National Key Laboratory of Precision Micro-Nano Manufacturing Technology. He has been engaged in the research of basic theories and applied technologies of micro-nano manufacturing and intelligent sensing for a long time. The relevant research results have been industrialized and applied, forming domestic substitution capabilities in the fields of aviation, aerospace, semiconductor manufacturing, high-end CNC machine tools, measuring instruments, etc.

Abstract:Facing the demand for nanometer-level measurement capabilities in domestic lithography machines and industrial machine tools, this research addresses the principles of spatial optical interference control and the design and manufacturing challenges of ultra-long enclosed precision gratings. By overcoming traditional in-plane optical interference measurement technology, a new grating measurement mode based on spatial optical interference control is proposed, enabling active control of spatial optical interference imaging and diffraction efficiency. Utilizing nanoimprint manufacturing technology, a position/force collaborative releasing conformal grating imprinting process is established to reduce manufacturing errors in grating structures, achieving synergistic formation of transverse and longitudinal subwavelength structures in the grating and accomplishing nanometer-level grating reading measurement capabilities.