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Conference Introduction

Aligned with the 15th Five-Year Plan strategy of strengthening quality infrastructure, standardization, and international cooperation, this conference focuses on the high-quality development of the nanotechnology industry. By leveraging the four pillars of National Quality Infrastructure (NQI)—metrology, standards, conformity assessment, and inspection & testing—the conference aims to build a collaborative platform supporting the transition of nanotechnologies from research to industrial applications.

The conference will focus on three key areas: advanced nanometrology, including atomic-scale measurement and nanoscale calibration; standard development for nanomaterials, devices, and applications; and quality ecosystem collaboration to establish full-cycle quality support from R&D to commercialization.

Bringing together experts, research institutions, and industry leaders from fields such as semiconductors, biomedicine, and new energy, the conference will explore pathways for NQI–nanotechnology integration and provide quality foundations for the future growth of the nanotechnology industry.

Organization

Hosts

    • Joint Laboratory of Advanced Manufacturing and Metrology Technology, Xi’an Jiaotong University and National Institute of Metrology
    • School of Instrument Science and Technology, Xi’an Jiaotong University
    • Soochow University
    • Suzhou Institute of Metrology Co., Ltd.
    • Suzhou Testing and Certification Group Co., Ltd.
    • State Key Laboratory for Manufacturing System Engineering
    • Atomic-scale Manufacturing Metrology Technology Society
    • Southwest Jiaotong University School of Mechanical Engineering

Co-organizers

    • Jiangsu Nanotechnology Standardisation Technical Committee
    • Suzhou Nanomaterials Industry Standardisation Union
    • Suzhou Institute of Metrology
    • National Technical Committee on Nanotechnology of Standardization Administration of China-Suzhou Working Group
    • Suzhou National Laboratory
    • Shanghai Institute of Measurement and Testing Technology Co., Ltd.

Chairman

    • Zhuangde Jiang

Executive Chairmen

    • Hongzhong Liu
    • Chenying Wang
    • Xuhui Sun
    • Sujuan Shi

Executive Vice Chairmen

    • Feng Han
    • Dan Fang
    • Chen Fu

Main Topics

2026 Agenda Overview

2026 Agenda Overview

Date: Oct.21, PM
Location: A110, Suzhou International Expo Center
Date: Oct.22, AM
Location: A110, Suzhou International Expo Center
Date: Oct.22, PM
Location: A110, Suzhou International Expo Center
The 2nd Conference on High-Quality Development of Nano Quality Infrastructure（Nano-NQI）
Xianyi Liu
（ President of Fujian Provincial Quality Infrastructure Collaborative Innovation Promotion Association）
This courseware revolves around the theme of giving full play to the integrated role of the quality infrastructure (NQI) and empowering the high-quality development of industrial chains and supply chains, and unfolds from three perspectives: First, to understand the connotations of the four levels—quality conformity, suitability, consistency, and high quality—and grasp the strategy of building a quality powerhouse; second, to elucidate the working mechanism of NQI and international development trends, and give play to the role of integrated services such as metrology, standards, inspection and testing, and certification and accreditation; and third, to jointly implement the strategies of patents, metrology, standards, quality, branding, and certification, provide quality empowerment to industrial chains and supply chains, guide enterprises to adopt the Excellent Performance Model, and achieve successful quality management.
Liu Xianyi, Senior Engineer, is a member of Fujian Province’s “Hundred-Thousand-Ten Thousand Talents Project.” He holds a Master of Engineering in Electrical Engineering from Zhejiang University and a Master of Arts in Public Administration from Syracuse University (USA). He currently serves as President of the Fujian Provincial Quality Infrastructure Collaborative Innovation Promotion Association. He formerly served as a member of the Party Leadership Group, Deputy Director General, and First-Class Inspector of the Fujian Provincial Administration for Market Regulation. He has long been engaged in product inspection, quality management, quality certification, brand promotion, and quality and safety supervision and enforcement. He has published 56 papers in the fields of public administration, quality management, and certification, and specializes in corporate management diagnosis, strategic management, and the establishment and evaluation of the Excellent Performance quality management model. He is a specially appointed expert of the China Hydroelectric and Electric Power Quality Management Association.
The 2nd Conference on High-Quality Development of Nano Quality Infrastructure（Nano-NQI）
Yuhong Hao
（ Deputy Director of the Division of Shanghai Institute of Measurement and Testing Technology Co., Ltd. (SIMT)）
This report focuses on sharing typical application achievements of our laboratory in integrated circuit material testing, covering eight major categories of core IC materials. We have established a mature trace impurity testing system for key raw and auxiliary materials such as electronic-grade water, photoresists and precursors. It enables full-dimensional compositional analysis of materials from surface and subsurface to bulk, as well as multi-level precise characterization ranging from micrometer to atomic scale. In the field of chip failure analysis, our laboratory has built an integrated service system combining non-destructive testing, failure localization, electrical verification and microscopic analysis. A complete technical analysis chain is formed, spanning macroscopic defect screening to in-depth atomic-scale dissection of failure mechanisms, which fully supports quality control, process optimization and key technical research for IC materials and chips.
Hao Yuhong, Senior Engineer, Deputy Director of Physical & Chemical Testing Division, Level 1 Registered Metrologist of China. She works at the Physical & Chemical Testing Division of Shanghai Institute of Measurement and Testing Technology Co., Ltd., and has long been engaged in research on material testing technologies. Currently, she holds the following concurrent positions: Member of the Nanogeometry Metrology Working Group (MTC2/WG2), National Technical Committee for Geometric Length Metrology; Member of the Scientific Testing Subcommittee, China Materials and Testing Standards Committee; Secretary of the Analytical Testing Special Committee, Shanghai Society for Measurement and Testing; CNAS Assessor, Shanghai CMA Assessor; Technical Review Expert for National Reference Materials; Expert of Shanghai Expert Database for Inspection, Testing and Certification. In the past five years, she has presided over or participated in more than ten research projects funded by the National Key R&D Program and Shanghai Science and Technology Commission, including the national key R&D project Application Demonstration of Nanogeometric Characteristic Parameter Metrology Standards in the Biomedical Industry. She has published 15 academic papers and obtained 4 authorized invention patents. Her research achievements have won 2 Second Prizes and 1 Third Prize of Shanghai Science and Technology Progress Award. She has also formulated and revised 1 national metrology calibration specification.
The 2nd Conference on High-Quality Development of Nano Quality Infrastructure（Nano-NQI）
Yuanliu Chen
（ Professor of Zhejiang University）
To address the problems of traditional off-line measurement in ultrafast laser machining, namely the need to transfer workpieces and the susceptibility to coordinate registration and repositioning errors, this study proposes a coaxial-confocal method that integrates ultrafast laser machining with in-situ measurement. The new method integrates confocal measurement coaxially with the laser machining process, allowing surface profiles and microstructure geometry to be measured directly during the machining flow and capturing geometric changes caused by ablation and debris deposition. By integrating machining and measurement into one unit through coaxial confocal configuration, this study embeds topographic inspection into the manufacturing process, providing a key enabling technique for closed-loop ultrafast laser fabrication with high precision, high consistency, and robustness.
Yuan-Liu Chen is a Qiushi Distinguished Professor and tenured professor at Zhejiang University, doctoral supervisor, and Vice Dean of the School of Mechanical Engineering. He is a recipient of the National Science Fund for Distinguished Young Scholars, the 8th Xplorer Prize, the Excellent Scientist Award of the International Society for Nanomanufacturing (ISNM), and the inaugural Lu Yongxiang Excellent Young Scholar Award. In recent years he has led national key research programs including the Special Project / Young Investigator Category A of the National Natural Science Foundation of China, the National Key Research and Development Program, and the High-Quality Development Special Program. He has published over 100 SCI-indexed papers in internationally authoritative journals such as CIRP Annals, and holds more than 50 granted invention patents. He has proposed technologies that integrate self-sensing and self-excitation regulation of heteroatom-doped diamond tools, micro-force sensing with servo control, and integrated actuation, sensing, control atomic-level machining, and has developed a range of high-performance equipment applicable to cross-scale, ultra-precision manufacturing processes. His work has received the First Prize of the China Machinery Industry Science and Technology Award and the First Prize of the Zhejiang Provincial Science and Technology Award (Technological Invention).
The 2nd Conference on High-Quality Development of Nano Quality Infrastructure（Nano-NQI）
Wansong Li
（ Product Director of Suzhou Bozhon Instruments Technology Co., Ltd.）
This presentation mainly introduces the development journey of Suzhou Bozhon Instruments Technology Co., Ltd., the first domestic 200kV transmission electron microscope (TEM), application cases, key technologies, and external collaborations.
Wansong Li, PhD in Materials Science, has 14 years of experience in transmission electron microscopy (TEM) applications. He currently serves as Product Director at Suzhou Bozhon Instruments Technology Co., Ltd. He is mainly responsible for product definition, marketing, applications, project cooperation, laboratory management and other related work. He was a key member participating in the development of the first- and second-generation TEM prototypes, contributing to domestic substitution of the equipment.
The 2nd Conference on High-Quality Development of Nano Quality Infrastructure（Nano-NQI）
Hongzhong Liu
（ Professor of Xi'an Jiaotong University）
The demand for angle measurement has entered an era of dynamic measurement at the milliarcsecond level (1-10 mas, 0.001"-0.01"). Currently, ultra-high-precision autocollimators and the highest-precision angular reference devices can only achieve measurement accuracy at the 10-mas level under static or quasi-static conditions, and cannot meet the requirements of milliarcsecond-level dynamic angle measurement. Based on the complementary advantages of metrology-grade ultra-precision circular gratings and optical gyroscopes in angle measurement, an optical–inertial integrated angle measurement device is proposed. Addressing the challenges of high-precision calibration of optical gyroscopes and nonlinear compensation of circular grating subdivision errors is an effective approach to achieving sub-milliarcsecond-level dynamic angle measurement.
Liu Hongzhong, Professor, Xi’an Jiaotong University. Professor Liu has long focused on micro/nano manufacturing technology, equipment, and applications. Centering on the core key functional components of high-end CNC machine tools, he has led and completed more than 30 national key projects, including National Science and Technology Major Projects, the National Key R&D Program, and Major Research Plans of the National Natural Science Foundation of China. His research achievements have been applied in fields such as CNC machine tools, aerospace, national defense and military, robotics, and automation.
The 2nd Conference on High-Quality Development of Nano Quality Infrastructure（Nano-NQI）
Xueli Wang
（ Application Expert of Yidon Technologies Co., Ltd.）
电子显微镜凭借高分辨率成像能力，已成为纳米材料研究中不可替代的核心表征手段。 当前，屹东光学具身智能电镜能够对纳米材料进行缺陷自主定位、自主采集与自主分析，并可基于表征结果进行智能化分析，给出结论以及建议，实现从数据采集到结果输出的全流程智能化，显著提升表征效率与一致性。 电镜高清晰表征能力与智能化自主分析的结合，为纳米材料微观结构研究与质量控制提供了高效可靠的技术路径，对推动该领域科研与产业发展具有重要意义
王雪丽，博士，在电镜领域深耕近15年，熟练掌握SEM、EBSD、EDS、FIB/SEM双束系统及TEM等技术，发表论文十余篇，获发明专利一项。博士期间自主开发特殊样品台申请专利，奠定了扎实的电镜操作与应用功底。 现任屹东光学技术专家，负责全国显微镜市场业务拓展及重要项目技术支持。此前在卡尔蔡司工作近十年，历任电子显微镜应用工程师、技术专家及销售发展岗位，长期从事电镜技术支持与行业解决方案工作。在半导体失效分析、新能源材料表征、金属材料微观分析等领域积累了丰富经验，是一位电镜应用经验深厚的技术专家。
The 2nd Conference on High-Quality Development of Nano Quality Infrastructure（Nano-NQI）
Lei Chen
（ Professor of Southwest Jiaotong University）
Atomic layer removal manufacturing technology requires controllable processing and precise characterization, with material removal precision controlled at the atomic-layer scale. As the feature sizes of advanced chips continue to shrink, wafer surface roughness must reach the atomic scale to ensure lithographic resolution. In addition, the polishing removal precision of heterogeneous materials on interconnect surfaces must be controlled at the atomic-layer scale so that the polishing endpoint can be accurately determined and chip yield requirements can be met. In the field of high-end equipment, atomic layer polishing enables controllable atomic-level material removal, thereby achieving localized atomic-level flat surface processing and further satisfying the long-life and high-reliability service requirements of core components under extreme conditions. In the field of sensing and detection, atomic layer removal is expected to fabricate edge structures with customized atomic arrangements, enabling a several-fold enhancement in gas sensor sensitivity.
Professor and Doctoral Supervisor, School of Mechanical Engineering, Southwest Jiaotong University; Vice Dean of the Graduate School (on secondment). He has long been engaged in research on atomic-level polishing and surface property regulation. He has led more than 10 national and provincial/ministerial projects, including the NSFC Excellent Young Scientists Fund, key projects under the NSFC Major Research Plan and Original Exploratory Program, the Young Scientists Project of the National Key R&D Program, and the Sichuan Provincial Innovative Research Group Program. He has published over 110 academic papers in international journals such as Nature Communications, PNAS, PRL, and ACS Nano, and has been granted 22 national invention patents. His awards include the First Prize for Natural Science from the Ministry of Education (ranked 3rd) and the Second Prize for Science and Technology from the Chinese Society of Rare Earths (ranked 1st), among others. He has been invited to give more than 30 invited talks at international and domestic academic conferences, and serves as an editorial board member or young editorial board member for eight SCI/EI journals, including the Chinese Journal of Mechanical Engineering (Chin J Mech Eng).
The 2nd Conference on High-Quality Development of Nano Quality Infrastructure（Nano-NQI）
Shuming Yang
（ Professor of Xi'an Jiaotong University）
Near-field optical scanning microscopy, which integrates optical measurement with scanning probe technology, retains the advantages of both methods while imposing no special requirements for the measurement environment and test samples. It has achieved nanoscale lateral resolution and enables simultaneous multi-parameter measurement of topography. However, the resolution is still limited by the dimension of probes and detection methods. In this report, a series of optical nano probes and corresponding imaging methods that we have developed will address challenges in existing topography measurement.
Prof. Dr. Shuming Yang is from Xi’an Jiaotong University (XJTU), China. His main research interests include micro/nanofabrication and measurement, intellignt manufacturing, optical measurement and instrumentation etc. As the principle investigator, he has held more than 20 major research projects including National Science Fund for Distinguished Young Scholars, National Key R&D Program of China, National Science and Technology Major Projects etc. He has achieved more than 10 technical awards. He is the president of Asian Society for Precision Engineering and Nanotechnology (ASPEN), the vice president of the International Society for Nanomanufacturing (ISNM), ISNM Fellow, VEBLEO Fellow etc. He is the Editor-in-Chief of Advanced Manufacturing, and editorial board members of JMS, IJPEM-GT, IJRAT, NMME etc. He delivered plenary and keynote talks in academic conferences for more than 100 times.
The 2nd Conference on High-Quality Development of Nano Quality Infrastructure（Nano-NQI）
Xinbin Cheng
（ Professor of Tongji University）
Nanometrology is the foundation and prerequisite of nanomanufacturing, and the cornerstone for promoting high-quality development of chip manufacturing and micro/nano-optical manufacturing. First, a nanometrology technique based on quantized optical lattice constants is introduced: cold atoms are manipulated through optical lattice potential wells to arrange into national standards for nanoscale length and angle, with absolute accuracy at the picometer level and without the need for calibration. A breakthrough has been made in the key technology for embedding national nanoscale length standards into grating interferometers, and a grating-interferometric metrology instrument with direct traceability has been developed, enabling calibration of nanomanufacturing errors. Furthermore, micro/nano-optics research addressing major national needs is introduced: a new configuration of quasi-three-dimensional subwavelength structural devices based on multilayer films plus metasurfaces is proposed, significantly improving efficiency; a nanometrology-enabled full-process manufacturing technology has been established, overcoming the cross-scale precision manufacturing challenge of micro/nano-optical devices; and combining micro/nano-optical devices with computational optics has formed a monolithic computational imaging system, helping to improve the lightweight and compact design of optical payloads.
Xinbin Cheng is a recipient of the National Science Fund for Distinguished Young Scholars, leader of the National Metrology Innovation Team, Director of the Institute of Precision Optical Engineering, and Director of the National Integrated Circuit Micro/Nano Inspection Equipment Industrial Metrology and Testing Center (Shanghai). He is committed to interdisciplinary research in nanometrology and micro/nano-optics. His innovative work has provided core devices, technologies, and solutions for major national needs. As first/corresponding author, he has published more than 50 papers in journals such as Light: Science & Applications, Opto-Electronic Advances, and Physical Review Letters. In 2025, he received the First Prize of the National Science and Technology Progress Award (ranked 1st), and in 2019, the Second Prize of the National Technology Invention Award (ranked 2nd). He serves as Associate Editor of the Opto-Electronic journal cluster, Co-Editor-in-Chief of Light Precision Engineering, editorial board member of several domestic and international journals, member of the International Organization for Standardization (ISO) Committee on Optical Materials and Devices, and Council Member of the Chinese Society for Measurement, among others.
The 2nd Conference on High-Quality Development of Nano Quality Infrastructure（Nano-NQI）
Xuhui Sun
（ Chairman/Chief Scientist of Suzhou Huiwen Nanotech Co., Ltd.）
Triboelectric nanogenerator (TENG), a recently emerging technology that is based on the combination of triboelectrication and electrostatic induction, has been found to be a promising solution to harvest large amounts of underutilized and low-frequency mechanical energy and convert them to electricity. Our recent research interest mainly focuses on the design and fabrication of high-performance TENGs for energy harvesting and self-powered sensing. In this presentation, I will firstly introduce a couple of recent achievements regarding highly flexible and deformable TENGs based on different kinds of electrodes, including geometrically designed rigid electrode, liquid electrode and 3D printed compressible electrode, etc. Then, I would like to present the combination of TENGs with other functional devices, such as supercapacitor for self-charging powered package, solar cell or electromagnet generator for large-scale energy harvesting, as well as photoanodes for self-powered photoelectrochemical water splitting system. Lastly, I will illustrate two different concepts of TENG based self-powered sensing, including TENGs as the active sensors for detecting the static and dynamic processes arising from mechanical motion, and impedance matching effect between TENGs and traditional sensors which induced self-powered sensing process.
Xuhui Sun received his B. Sc. and M. Sc. degrees in chemistry from Tsinghua University, Beijing, and Ph.D. degree in material science from the City University of Hong Kong. Before joined Institute of Nano Functional & Soft Materials (FUNSOM), Soochow University in 2009 as a professor, he was a research scientist at NASA Ames Research Center and adjunct assistant professor at Santa Clara University, CA. His research interests are focused in the area of the nanomaterials and their applications in nanoelectronics, sensors and energy harvesting. He is also interested in the development and application of synchrotron radiation techniques in nanomaterials study. He has published over 320 papers in high impact journals such as J. Am. Chem. Soc., Angew. Chem. Int. Ed., Adv. Mater., Nat. Commun., ACS Nano, Chem. Rev., etc. and held 5 US patents and 60 Chinese patents. He is a senior member of IEEE and has served associate editor of IEEE Transaction on Nanotechnology and editor board member of Frontiers in Materials and Nanomaterials. He has been PI or co-PI of a number of projects from the nation key research program, the national high-tech R&D Program and National Science Foundation of China (NSFC). He founded Suzhou Huiwen Nanotechnology Co., Ltd. in 2014, serving as the Chairman and Chief Scientist. The company focuses on the research, development, and production of advanced smart sensors.
The 2nd Conference on High-Quality Development of Nano Quality Infrastructure（Nano-NQI）
Yao Huang
（ Professor-level Senior Engineer of Nationalinstitute of Metrology, China）
The National Institute of Metrology, China (NIM) has developed and established a brand‑new angle reference. Its measurement range covers the full circle from 0° to 360°, with a measurement uncertainty of U=0.03'' (k=2) and a measurement resolution of ≤ 0.005″. Using this apparatus, the research team carried out international comparisons for key parameters including indexing angles over the full‑circle measurement range and interpolation angles within partial measurement ranges. Upon peer review by international counterparts, the team obtained international mutual recognition for two Calibration and Measurement Capabilities (CMCs): one for circular grating angle encoders and the other for rotary tables. Based on this work, the team performed full‑circle cross‑scale calibration for circular grating angle‑measuring systems. It realized extraction of continuous full‑circle angular error information under sub‑arc‑second sampling steps with mega‑level sampling points. For the first time internationally, the team discovered the full‑circle non‑uniform distribution law of medium‑ and short‑period errors in circular grating angle‑measuring systems. Wavelet analysis was introduced to implement error compensation. Compared with conventional error‑compensation techniques, the compensation efficiency is improved by more than 20%. This provides metrological traceability foundation for angle quantity value transfer with milli‑arc‑second‑level accuracy under milli‑arc‑second‑level resolution.
Doctor of Engineering, Professor‑level Senior Engineer Director, Angle and Gear Metrology Laboratory, Institute of Geometrical Metrology, National Institute of Metrology, China (NIM)，National First‑class Standard Assessor, Level‑1 Registered Metrologist, Principal Investigator of the National Primary Standard Facility for Plane Angle Metrology. Member of the National Technical Committee for Inertial Metrology; Member of the Working Group of the National Technical Committee for Geometrical Length Metrology. Off‑campus Master Supervisor at Xi’an Jiaotong University, Harbin Institute of Technology and Hefei University of Technology. Research Interests: Research on geometrical metrology technologies and development of standard facilities, with focus on angle metrology, digital remote metrology, and their primary and secondary standard facilities. As project leader, he has completed 2 science and technology projects of the State Administration for Market Regulation. As project contact person and key researcher, he has participated in 4 national key R&D programs and major scientific instrument projects/subjects. He led the establishment of the national primary standard facility for position angle metrology and the metrology standard facility for optical gyroscope angle measuring instrument at NIM. He was the first‑author to formulate the national standard for optical gyroscope angle measuring instruments. He has published more than 40 papers, obtained 10 authorized invention patents, and compiled 5 national calibration specifications. Awards: First Prize of Science and Technology Progress Award of Aviation Industry Corporation of China; Second Prize of Market Regulation Scientific Research Achievement Award; Second Prize of Science and Technology Progress Award of National Institute of Metrology, China.
The 2nd Conference on High-Quality Development of Nano Quality Infrastructure（Nano-NQI）
Xiaoliang Dou
（ Vice President of Beijing Hai'an Hongmeng Standard Substance Technology Co., Ltd.）
This presentation focuses on nanoparticle reference materials. It sorts out the eligibility of applicants, self-inspection of technical requirements and document checklist under the three-level system. It elaborates on technical requirements and common review risk points covering candidate material selection and dispensing, homogeneity and stability evaluation, value assignment and uncertainty assessment, packaging and storage. It also specifies the structure of the development report and writing specifications for key chapters. Meanwhile, it tracks the public consultation on draft metrological technical specifications such as Specification for the Production of Reference Materials, and alerts readers to subsequent adjustments in application and review criteria. This presentation aims to provide references for institutions developing nanoparticle reference materials in their compliance preparation, technical documentation organization and standardized report writing during the transition period of new regulations.
Dr. Dou Xiaoliang, Vice President of Beijing Haian Hongmeng Reference Materials Technology Co., Ltd. Dr. Dou is an expert in the National Reference Materials Expert Database. He serves as a member of the National Technical Committee on Particle Characterization, Separation and Sieving, and as Deputy Secretary-General of its Particle Subcommittee. He is also a member of the Nanotechnology Testing Subcommittee of the National Technical Committee on Nanotechnology Standardization, as well as a Young Council Member of the Chinese Society of Particuology. Dr. Dou has participated in the design and development of more than 300 national-level reference materials and has contributed to the drafting of more than ten national standards.
The 2nd Conference on High-Quality Development of Nano Quality Infrastructure（Nano-NQI）
Yao Chen
（ Associate Professor of Xi'an Jiaotong University）
Optically pumped magnetometers (OPMs) have demonstrated exceptional sensitivity for ultra-weak magnetic field measurements, paving the way for advanced applications such as magnetoencephalography (MEG) and ultra-low field nuclear magnetic resonance (ULF-NMR). However, the bulky nature of traditional table-top setups restricts their deployment in highly integrated, multi-channel, or portable systems. Here, we present the development of a highly integrated, chip-scale atomic magnetometer that leverages novel microfabrication techniques[1,2]. To address the opacity issue of traditional silicon-based cells, we developed a multi-faceted transparent MEMS alkali vapor cell[3]. Furthermore, we employed a femtosecond laser welding technique for cell sealing[4](as shown in Fig.1), which successfully preserves the octadecyltrichlorosilane (OTS) anti-relaxation coatings. For compact magnetic field control, we integrated MEMS bi-planar coils, enabling three-dimensional magnetic field manipulation within a miniaturized footprint. The fully packaged sensor features a compact size of just 45 mm × 15 mm × 12 mm and achieves a magnetic field sensitivity of 20 fT/√Hz[1]. Finally, we demonstrate the practical application of this sensor by constructing a ULF-NMR spectrometer, which was successfully utilized to detect and analyze the concentration of copper sulfate (CuSO₄) ions in aqueous solutions. Our work provides a scalable and high-performance solution for the next generation of brain magnetic field imaging and biochemical ULF-NMR analysis. [1]Ma Y, Chen Y, Yu M, Wang Y, Guo J, Yang P, et al. Chip-scale quantum magnetometer empowered by reflector-integrated all-in-one atomic vapor cell. Science China Physics, Mechanics & Astronomy 2026, 69(2): 220313. [2] Wang Y, Yu M, Chen Y, Ma Y, Han X, Xia Y, et al. The fabrication of MEMS alkali metal vapor cells based on ultrafast laser welding for single beam magnetometer. Microsystems & Nanoengineering 2025, 11(1): 153. [3] Yu M, Chen Y, Wang Y, Han X, Luo G, Zhao L, et al. Microfabricated Atomic Vapor Cells with Multi-Optical Channels Based on an Innovative Inner-Sidewall Molding Process. Engineering 2024, 35: 46-55. [4]Ma Y, Chen Y, Yu M, Wang Y, Lu S, Guo J, et al. Ultrasensitive SERF atomic magnetometer with a miniaturized hybrid vapor cell. Microsystems & Nanoengineering 2024, 10(1): 121.
Chen Yao is an Associate Professor at the School of Instrument Science and Technology, Xi’an Jiaotong University. He received his Ph.D., and serves as a doctoral and master’s supervisor. He was a postdoctoral researcher in the Department of Physics at Harvard University. His research interests focus on novel micro-/nano-fabrication and sensor technologies, quantum sensors and their chip integration, as well as precision quantum measurements and quantum simulation based on ion traps. He plans to conduct interdisciplinary research and apply these technologies to advanced medical equipment for magnetoencephalography (MEG), intelligent power grids, and quantum simulation. He has led a number of key projects, including the Youth Scientist Program under the National Key R&D Program, the General Program and the Youth Program of the National Natural Science Foundation of China, commissioned projects from State Grid and other well-known enterprises, as well as the “Siyuan Scholar” program of Xi’an Jiaotong University and open projects from the Zhijiang Laboratory. He has published multiple research papers as first author or corresponding author in leading journals such as Physical Review Letters, Engineering, Microsystem and Nano-Engineering, Biomedical Optics Express, and Optics Express, among others.
The 2nd Conference on High-Quality Development of Nano Quality Infrastructure（Nano-NQI）
Simon Tao
（ National Sales Manager of China of BINDER Environmental Testing Equipment (Shanghai) Co., Ltd.）
Abstract：The upgrading of the nano industry cannot be achieved without reliable Climate testing. Current development status of the nano industry: Characterized by rapid technological iteration and a wide range of application scenarios (new energy, electronics, optoelectronics, biomedicine and advanced new materials), industrialization and large-scale production have become its core trends. Core industry pain points: Nanomaterials and nanodevices feature miniature dimensions and high performance sensitivity. Variations in temperature, humidity, climate and ageing conditions can easily trigger performance degradation and product failure, restricting product stability and mass production quality. Core viewpoint: Precision Climate testing serves as the core support for the R&D finalization, quality control, standard compliance and industrial quality upgrading of nano products. It also constitutes an essential supporting capability for the localization and high-end development of the high-end nano industry. Core framework of this presentation: This speech interprets how Climate testing empowers the high-quality development of the nano industry from five dimensions: industry pain points, testing value, technical solutions, implementation practices and future trends.
Mr. Tao Gang National Sales Manager Mr. Tao Gang serves as National Sales Manager of BINDER GmbH China. He entered the field of Climate testing equipment in 2011, covering the full spectrum of R&D, manufacturing and sales. With 15 years of in-depth experience in the Climate reliability testing industry, he has long served high-end manufacturing sectors including advanced new materials, automotive and semiconductors. He specializes in implementing Climate simulation solutions for material aging, temperature-humidity cycling and stability testing. Having profound insight into reliability testing pain points of nanomaterials and nano-devices during R&D and mass production stages, he leverages the precision Climate simulation technology of Germany-based BINDER to deliver standardized and reproducible Climate testing support for nano enterprises, empowering the high-quality upgrading of the nano industry.
The 2nd Conference on High-Quality Development of Nano Quality Infrastructure（Nano-NQI）
Yaxin Zhang
（ Assistant Professor of State Key Laboratory for Manufacturing System Engineering）
To meet the demand for traceability of geometric reference materials at the atomic scale for atomic-level manufacturing, the speaker has carried out a series of work on the localization and independent controllability of reference materials. This report focuses on the team’s latest research progress in the development of atomic layer step height reference materials and transmission electron microscopy reference materials traceable to the silicon lattice constant. It also covers the preparation of micro/nano grating reference materials based on atomic-level precision control and the construction of a traceability system. These efforts aim to provide reliable metrological support and traceability assurance for atomic-level manufacturing and to facilitate the independent construction and continuous improvement of nanoscale quality infrastructure.
Yaxin Zhang is an assistant professor in the State Key Laboratory for Manufacturing System Engineering. Her research focuses on micro/nano manufacturing technology and micro/nano geometric reference materials. As a key project member, she has been involved in multiple national projects, including the National Key R&D Program and the Major Research Instrumentation Program of the National Natural Science Foundation of China. She has received various science and technology awards, including the First Prize of the China Machinery Industry Science and Technology Award and the First Prize of the Shaanxi Science and Technology Workers Innovation and Entrepreneurship Competition. She has developed ten national secondary reference materials and participated in the formulation of one national standard.
The 2nd Conference on High-Quality Development of Nano Quality Infrastructure（Nano-NQI）
Zhengbo Liu
（ Dr. of Suzhou National Laboratory）
Trace metal impurities in high-purity electronic materials can significantly affect the electrical performance and yield of semiconductor devices. Establishing elemental analytical methods featuring high sensitivity and low background is critical for quality evaluation and production control of electronic materials. Electronic materials exist in diverse forms with vastly different matrices, so dedicated testing schemes must be adopted to achieve accurate quantification of impurities. Meanwhile, high-purity systems impose extremely strict requirements on the detection limit of analytical instruments. In addition, high-concentration major elements in samples tend to cause severe mass spectral interferences to target analytes. Such interferences cannot be fully eliminated merely by optimizing instrument modes and targeted sample pretreatment techniques and testing strategies must be combined to suppress interferences synergistically.
He obtained his PhD from East China Normal University, specializing in ICP-MS analytical methods. He has participated in 3 major scientific research projects. He has published 7 papers in chemistry journals including Talanta, Chemical Geology, etc., and holds 3 related patents. He has led and taken part in more than 10 national standards.
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