Yanfei Zhao
(
Director of Wintech Nano (Suzhou) Co., Ltd.)
In semiconductor manufacturing, trace organic and inorganic contaminants can originate from a wide range of process steps, including lithography, cleaning, etching, thin-film deposition, packaging, and equipment or materials. Due to the diversity and complexity of potential contaminants and their sources, conventional TOF-SIMS data interpretation relies heavily on expert experience and manual spectral analysis, resulting in challenges such as low analysis efficiency, strong dependence on individual expertise, and difficulties in identifying complex mixed contaminants.
This presentation introduces an intelligent TOF-SIMS analysis platform developed for semiconductor process contamination identification and source tracing. Based on raw TOF-SIMS mass spectral data, the platform integrates peak and feature extraction, spectral feature selection, molecular fragment identification, chemical and physical rule-based constraints, and spectral-library similarity matching. This enables a stepwise analytical workflow from mass spectral signals to fragment interpretation, material classification, and potential contamination source association.
Practical case studies from semiconductor failure analysis and process contamination investigations will be presented to demonstrate the application of the platform in organic contaminant identification, complex mixed-contamination analysis, and Good/Bad sample differentiation. The presentation will also discuss how historical failure cases, reference-material spectra, process-material information, and expert knowledge can be systematically incorporated into an evolving knowledge base.
By combining AI algorithms with domain expertise in surface analysis, the platform enables TOF-SIMS analysis to move from expert-dependent point-by-point interpretation toward data-driven and knowledge-enhanced intelligent analysis, providing a practical approach for rapid contaminant identification, source tracing, and semiconductor failure analysis.
Dr. Zhao Yanfei is currently the Director of the Surface Analysis Laboratory and Head of the Suzhou Surface Analysis Laboratory at Wintech-Nano (Suzhou). She received her Ph.D. in Science from Peking University. She has extensive experience in semiconductor surface analysis, technology development, application, and laboratory management, with a particular focus on the application of XPS, AES, and TOF-SIMS in advanced semiconductor processes. She has received several professional honors, including the Senior Engineer qualification in Electronic Information Engineering of Jiangsu Province, recognition as an expert in Suzhou’s Inspection, Testing, Certification and Accreditation Expert Database, the Gusu Key Industrial Talent Program, and the Suzhou Outstanding Young Skilled Worker Award. In 2023, she led the surface analysis team to receive the "Outstanding Team Award" in Wintech-nano. She has served as the principal investigator of one National Natural Science Foundation of China project, participated in six national and provincial Natural Science Foundation projects, published more than 50 scientific papers with over 1,000 citations, and holds more than 20 patents. She also serves as a reviewer for international journals including Scientific Reports and Applied Surface Science.